M. Kubenz: search on Z-Library

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1

Fast heating and cooling in nanoimprint using a spring-loaded adapter in a preheated press

Helmut Schift, Sandro Bellini, Jens Gobrecht, Frank Reuther, Mike Kubenz, Morten Bo Mikkelsen, Konrad Vogelsang

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 1.30 MB

english, 2007

2

Design of low Tg thermosets for short cycle time nanoimprint lithography

F. Reuther, M. Fink, M. Kubenz, C. Schuster, M. Vogler, G. Gruetzner

Journal:

Microelectronic Engineering

Year:

2005

Language:

english

File:

PDF, 198 KB

english, 2005

3

Embedded nano channels fabricated by non-selective reverse contact UV nanoimprint lithography technique

N. Kehagias, G. Chansin, V. Reboud, M. Zelsmann, C. Schuster, M. Kubenz, F. Reuther, G. Gruetzner, C.M. Sotomayor Torres

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 406 KB

english, 2007

4

Silikathaltige Harnsteine im Klinikalltag

M. May, C. Helke, K. Kubenz, M. Seehafer, M. Wolter, B. Hoschke

Journal:

Year:

2005

Language:

german

File:

PDF, 564 KB

german, 2005

5

Complete 3D UV microfabrication technology on strongly sloping topography substrates using epoxy photoresist SU-8

R. Engelke, G. Engelmann, G. Gruetzner, M. Heinrich, M. Kubenz, H. Mischke

Journal:

Microelectronic Engineering

Year:

2004

Language:

english

File:

PDF, 526 KB

english, 2004

6

Effective baking of thick and ultra-thick photoresist layers by infrared radiation

M Kubenz, U Ostrzinski, F Reuther, G Gruetzner

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 532 KB

english, 2003

7

High-rigidity Tyre Test Bench for Increased Measurement Accuracy

Dipl.-Ing. Pavel Sarkisov,Dipl.-Ing. Jan Kubenz…

Journal:

ATZ worldwide eMagazine

Year:

2015

Language:

english

File:

PDF, 662 KB

english, 2015

8

Steifer Reifenprüfstand für höhere Messgenauigkeit

Sarkisov, Pavel, Kubenz, Jan, van Putten, Sebastiaan, Prokop, Günther

Journal:

ATZ - Automobiltechnische Zeitschrift

Year:

2015

Language:

german

File:

PDF, 793 KB

german, 2015

9

Pattern Transfer Process Using Innovative Polymers in Combined Thermal and UV Nanoimprint Lithography (TUV-NIL)

Brunetti, Francesca, Harrer, Stefan, Scarpa, Giuseppe, Lugli, Paolo, Kubenz, Mike, Schuster, Christine, Reuther, Freimut

Journal:

MRS Proceedings

Year:

2007

Language:

english

File:

PDF, 2.83 MB

english, 2007

10

Reverse-contact UV nanoimprint lithography for multilayered structure fabrication

Kehagias, N, Reboud, V, Chansin, G, Zelsmann, M, Jeppesen, C, Schuster, C, Kubenz, M, Reuther, F, Gruetzner, G, Torres, C M Sotomayor

Journal:

Year:

2007

Language:

english

File:

PDF, 788 KB

english, 2007

11

Submicron three-dimensional structures fabricated by reverse contact UV nanoimprint lithography

N. Kehagias, V. Reboud, G. Chansin, M. Zelsmann, C. Jeppesen, F. Reuther, C. Schuster, M. Kubenz, G. Gruetzner, C. M. Sotomayor Torres

Year:

2006

Language:

english

File:

PDF, 757 KB

english, 2006

12

Fabrication of Nanoimprint stamps for photonic crystals

J, Kouba, M, Kubenz, A, Mai, G, Ropers, W, Eberhardt, B, Loechel

Journal:

Journal of Physics Conference Series

Year:

2006

Language:

english

File:

PDF, 1.36 MB

english, 2006

13

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Advances in Resist Technology and Processing XX - Challenges of processing thick and ultrathick photoresist films

Kubenz, Mike, Ostrzinski, Ute, Reuther, Freimut, Gruetzner, Gabi, Fedynyshyn, Theodore H.

Year:

2003

Language:

english

File:

PDF, 708 KB

english, 2003

14

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Emerging Lithographic Technologies XI - mr-NIL 6000: new epoxy-based curing resist for efficient processing in combined thermal and UV nanoimprint lithography

Schuster, Christine, Lercel, Michael J., Kubenz, Mike, Reuther, Freimut, Fink, Marion, Gruetzner, Gabi

Year:

2007

Language:

english

File:

PDF, 661 KB

english, 2007

15

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Emerging Lithographic Technologies XI - Nanoimprinting with SU-8 epoxy resists

Johnson, Donald W., Lercel, Michael J., Miller, Harris, Kubenz, Mike, Reuther, Freimut, Gruetzner, Gabi

Year:

2007

Language:

english

File:

PDF, 322 KB

english, 2007

16

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - Development of thermosets for thermal nanoimprint lithography at decreased temperatures

Reuther, Freimut, Mackay, R. Scott, Kubenz, Mike, Schuster, Christine, Fink, Marion, Vogler, Marko, Gruetzner, Gabi, Grimm, Juergen, Kaeppel, Andi

Year:

2005

Language:

english

File:

PDF, 538 KB

english, 2005

17

SAE Technical Paper Series [SAE International WCX™ 17: SAE World Congress Experience - (APR. 04, 2017)] SAE Technical Paper Series - Vehicle Modeling for Dynamics Analysis Based on a New Hybrid Algorithm

Zhou, Junyu, Liu, Chao, Kubenz, Jan, Prokop, Günther

Year:

2017

Language:

english

File:

PDF, 1.78 MB

english, 2017